Zaber™ Vacuum Compatible Motorized Stages

Zaber™ Vacuum Compatible Motorized Stages are designed for integration into vacuum systems and are available in high vacuum 10^-6 Torr stages or low vacuum 10^-3 Torr configurations (upon request). The stage body components are specifically engineered to limit outgassing of contaminants in the vacuum chamber, the included stepper motors are designed for thermal management in high vacuum environments, and the stages can be connected to a computer interface with minimal feed-through wires. Zaber™ Vacuum Compatible Motorized Stages are available in linear, 360° rotational, and goniometric configurations, allowing for a complete 6 Degree-of-Freedom system to be constructed in a vacuum. These stages are ideal for applications operating in high vacuum conditions, such as semiconductor manufacturing and processing, or optical coating processes.

Note: An accessories kit, #75-301, is required and sold separately.